TRIPLE SHOWERHEAD AND ALD APPARATUS INCLUDING THE TRIPLE SHOWERHEAD

摘要

PURPOSE: A triple showerhead with an ALD(Atomic Layer Deposition) apparatus is provided to prevent the mixture of a first source and a second source. CONSTITUTION: A baffle(180) has a first fluid path(184a) and a second fluid path. The first source and the second source flow through first and 2 flow path respectively. The entrance of the first fluid path is formed on the first side surface of the baffle. An entrance of a second fluid path is formed on the second side of the baffle. A supply plate(140) surrounds a first, a second, a third, a fourth side. The feed plate has a first buffer(144a) and a second buffer(144b).