首页> 外国专利> METHOD AND AN APPARATUS FOR MANUFACTURING A PRINTED CIRCUIT BOARD, CAPABLE OF IMPROVING DEGREE OF MATCHING BETWEEN A CONTACT HOLE AND A PAD

METHOD AND AN APPARATUS FOR MANUFACTURING A PRINTED CIRCUIT BOARD, CAPABLE OF IMPROVING DEGREE OF MATCHING BETWEEN A CONTACT HOLE AND A PAD

机译:用于制造印刷电路板的方法和装置,该印刷电路板能够提高接触孔和垫之间的匹配度

摘要

PURPOSE: A method and an apparatus for manufacturing a printed circuit board are provided to improve degree of matching of an exposure process by correcting exposure position data according to position information of a contact hole.;CONSTITUTION: A substrate(100) includes an insulation layer(110a,110b), a conductive layer(150), and a photosensitive layer(160). A contact hole is formed on the insulation layer. The photosensitive layer is formed on the conductive layer. The first position data corresponds to the position of the contact hole. The second position data corresponds to the position of the pad. The position correction data corresponds to an error between the first position data and the second position data. The photosensitive pattern is formed by performing an exposure process and a development process on the photosensitive layer based on the position correction data. The pad is formed along the photosensitive pattern.;COPYRIGHT KIPO 2010
机译:目的:提供一种用于制造印刷电路板的方法和设备,以通过根据接触孔的位置信息校正曝光位置数据来提高曝光工艺的匹配度。;构成:基板(100)包括绝缘层(110a,110b),导电层(150)和感光层(160)。在绝缘层上形成接触孔。感光层形成在导电层上。第一位置数据对应于接触孔的位置。第二位置数据对应于垫的位置。位置校正数据对应于第一位置数据和第二位置数据之间的误差。通过基于位置校正数据在感光层上执行曝光处理和显影处理来形成感光图案。沿感光图案形成焊盘。; COPYRIGHT KIPO 2010

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