METAL CATALYSTS WITH LOCALLY CONTROLLED CHEMICAL ACTIVITIES CAPABLE OF GENERATING SHELL AND IRON NITRIDES AND MANUFACTURING METHOD THEREOF

摘要

PURPOSE: Metal catalysts with locally controlled chemical activities and a manufacturing method thereof are provided to manufacture carbon nano-tube having the constant walls can be controlled by controlling the size and structure of the metal catalyst.;CONSTITUTION: A manufacturing method of metal catalysts with locally controlled chemical activities includes the following steps: patterning micelle containing iron nano-particles on a silicon substrate; forming an iron particle by processing a copper substrate with plasma; extracting iron nitrides inside the iron particles by processing the iron particle with nitrogen plasma; and etching the iron nitrides after removing iron in the ethanol and a nitric acid mixture. In a plasma process, the plasma power is 500-800W and the plasma is formed at the temperatures of 600-900°C.;COPYRIGHT KIPO 2010