SLIT VALVE OF A CLOSING ASSEMBLY FOR A PROCESSING CHAMBER OF A SEMICONDUCTOR MANUFACTURING APPARATUS, CAPABLE OF MINIMIZING A TRANSFORMATION DUE TO PLASMA, GAS, AND HEAT

摘要

PURPOSE: A slit valve of closing assembly for a processing chamber of a semiconductor manufacturing apparatus is provided to improve the by forming a chamfer inside a slit valve and preventing the exfoliation of the semiconductor.;CONSTITUTION: A closing assembly comprises two flange type connection surfaces and a housing member. Two flange type connection surfaces are formed on a sealing element. The closing plate is closely attached to each chamber of the housing member and includes the slit valve(9). A closing plate is supported by a chamber so that it is moved linearly and vertically. A chamfer(101) is formed inside the slit valve.;COPYRIGHT KIPO 2010