IMPRINT APPARATUS, AN IMPRINT METHOD AND A METHOD FOR MANUFACTURING AN ARTICLE IMPROVING THROUGHPUT BY PROCESSING SIMULTANEOUSLY WITH A PLURALITY OF UNITS

摘要

PURPOSE: An imprint apparatus, an imprint method and a method for manufacturing an article are provided to realize precise alignment between a mold and a substrate by preventing displacement with a fixing unit.;CONSTITUTION: A pressing unit(120) exerts pressure a resin on a substrate(W) and a mold each other. A hardening unit(140) hardens a shaped resin by the mold through light radiation. A transferring unit(170a) transfers the mold and the substrate from the location in which pressure is exerted with the pressing unit to the location in which the light is radiated with the hardening unit. The transferring unit transfers the mold and the substrate from the location in which the light is radiated with the hardening unit to the location in which the mold is released. An aligning unit(130) performs alignment between the substrate and a mold pattern.;COPYRIGHT KIPO 2010