ELECTROMAGNETIC WAVE/PARTICLE BEAM SPECTROSCOPY AND ELECTROMAGNETIC WAVE/PARTICLE BEAM SPECTROSCOPE

摘要

Provided are an electromagnetic wave/particle beam spectroscopy and an electromagnetic wave/particle beam spectroscope in which a spectroscopic function that is tolerant to electric noise caused by electromagnetic noise, vibration, loud sound, heat, and particle beams/electromagnetic waves other than a specific particle beam/electromagnetic wave on which attention is focused, mechanical destruction, and recoil of atoms constituting a solid, and has higher tolerance to exposure of a detection means to radiation than the conventional energy decomposition technology is hard to deteriorate. A spectroscope (10) is provided with a Laplace transform filter (11) for Laplace-transforming the intensity of an incident spectrum, a detection element (15) for detecting the transmission intensity of the incident spectrum, and a computing unit (17) for computing the incident intensity of the incident spectrum incident on the Laplace transform filter (11) by inversely Laplace-transforming the detected transmission intensity of the incident spectrum.;COPYRIGHT KIPO & WIPO 2010