SELF DIAGNOSTIC SYSTEM USING NETWORK TYPE DYNAMIC SIMULATOR AND SELF DIAGNOSTIC METHOD

摘要

PURPOSE: A self-diagnosis device and a method thereof are provided to operate the wide range process of each processing tools by individually interlinking each mathematical calculation processor in order to process the process of each processing tools of a processing system. CONSTITUTION: A network processor server(31) includes a tank computing processor, a process line computing processor, a valve computing processor, a pump computing processor and a sensor calculation processor. A tank computing processor(33) to be connected to the tank calculates a mathematical modeling. A process line computing processor(34) to be connected to the connection part of each processor line calculates the mathematical modeling. A valve computing processor(35) to be connected to each valve calculates the mathematical modeling. A pump computing processor(36) to be connected to the pump calculates the mathematical modeling. A sensor computing processor(37) to be connected to a sensor calculates the mathematical modeling.