RESIN COATING PROCESS, IMPRINTING APPARATUS AND IMPRINTING METHOD FOR IMPRINT PROCESS BEING ABREAST KEPT AND ENFORCING AND IMPROVING PROCESSING EFFICIENCY

摘要

PURPOSE: It keeps abreast the resin coating process and imprint process and the imprinting apparatus and imprinting method enforce. Throughput is improved.;CONSTITUTION: A coating apparatus(140) spreads resin in the top of the substrate. As to the surface and the side which is parallel of substrate, the first drive machinery(141) varies the relative position between substrate and the mold. As to the surface and the side which is parallel of substrate, the second driver tool(142) varies the relative position between substrate and the coating apparatus. It controls the coating apparatus and drive machinery and it keeps abreast the resin coating process and imprint process and controller enforces.;COPYRIGHT KIPO 2010