IMPRINT PROCESSING APPARATUS, IMPRINT PROCESSING METHOD, AND IMPRINT PROCESSED OBJECT

摘要

PROBLEM TO BE SOLVED: To provide an imprint processing apparatus and an imprint processing method with less restriction on materials for UV ray irradiation for imprinting a UV curable resin.;SOLUTION: An imprinting processing apparatus 4 comprises a light irradiation device 9 and a transcription device 11. The light irradiation device 9 delivers a UV ray to a resin layer 5 which includes an uncured UV-ray curable resin that is cured with a delay and which is formed on a substrate main body 3. The transcription device 11 provides the resin layer 5 with an uneven pattern 5c by starting operation of pressing a flat-plate mold 13 on the resin layer 5 after the UV-ray irradiation and before the start of the cure of the resin layer 5.;COPYRIGHT: (C)2012,JPO&INPIT