METAL WIRING AND A METAL WIRING FORMING METHOD FOR PREVENTING THE TECTONIC DEFORMATION OF METAL WIRING

摘要

PURPOSE: A metal wiring and metal wiring forming method seclude the inflow of impurity and the moisture created in the interface between the metal wiring and the contact plug. The electro migration characteristics degradation of the metal wiring is prevented.;CONSTITUTION: A first barrier metal layer(110) and a second barrier metal layer(115) are formed on the insulating layer(105) including the trench. A metal layer(120) is formed on the second barrier metal layer including the trench. The trench external metal layer, and the first barrier metal layer and the second barrier metal layer are removed. The first metal wiring layer and the second metal wiring layer are formed on the insulating layer.;COPYRIGHT KIPO 2010