CHEMICAL SOLUTION DISTRIBUTOR CAPABLE OF CONTROLLING INNER PRESSURE, A SUBSTRATE PROCESSING DEVICE INCLUDING THE SAME, AND A CHEMICAL SOLUTION DISTRIBUTING METHOD THEREOF

摘要

PURPOSE: A chemical solution distributor, a substrate processing device including the same, and a chemical solution distributing method thereof are provided to improve yield of a product by reducing a process failure by constantly supplying the chemical solution.;CONSTITUTION: A chemical solution distributor(240) includes a body(241) and a pressure controller(243). The body includes a storage space(241a) for storing a chemical solution. The body includes an inlet(241b) for inputting the chemical solution and an outlet(41a) for outputting the chemical solution to the outside. The pressure controller is installed inside the body. The pressure controller includes a partition(243a) for dividing the storage space into two parts and a support unit(243b) for supporting the partition. The pressure controller controls the chemical solution flow rate from the body and the chemical solution storage capacity of the body.;COPYRIGHT KIPO 2010