MICRO CHANNEL FORMATION METHOD USING A LIFT-OFF TECHNIQUE WHICH MAKES A CHANNEL FOR PDMS

摘要

PURPOSE: A micro channel formation method using a lift-off technique is provided to make a channel at a low price without complex process or equipment.;CONSTITUTION: Photoresist is patterned after loading the on a substrate(G). Polydimethyl siloxane(P) is coated on the top of the substrate. A channel(C) corresponding to the shape of removed photoresist is formed on polydimethyl siloxane by removing photoresist. Polydimethyl siloxane equipped with channel is sealed with glass and polydimethyl siloxane after diluting polydimethyl siloxane and inserting to photoresist.;COPYRIGHT KIPO 2010