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PLASMA GENERATION APPARATUS, USING ELECTROMAGNETIC WAVES, CAPABLE OF GENERATING ATMOSPHERIC PLASMA OF LARGE CAPACITY STABLY
PLASMA GENERATION APPARATUS, USING ELECTROMAGNETIC WAVES, CAPABLE OF GENERATING ATMOSPHERIC PLASMA OF LARGE CAPACITY STABLY
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机译:使用电磁波的等离子体生成装置,能够稳定地产生大容量的大气等离子体
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摘要
PURPOSE: A plasma generation apparatus, using electromagnetic waves is provided to generates high density plasma of high temperature without an igniter by increasing the height and volume of a waveguide and increasing the average strength of electric field.;CONSTITUTION: The waveguide(50) has a magnetron radiating electromagnetic wave. A dielectric tube(60) is installed in the waveguide and generates the plasma. The waveguide includes a first waveguide having a first height and a tapered part which is inclined from the end by a certain angle. A dielectric tube is included on the tapered part of the waveguide and a first waveguide or boundary.;COPYRIGHT KIPO 2010
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