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SYSTEM AND A METHOD FOR CONTROLLING SEMICONDUCTOR MANUFACTURING EQUIPMENTS USING A USER INTERFACE, CAPABLE OF PREVENTING THE LOSS OF DATA IN CASE OF A SCREEN CHANGE
SYSTEM AND A METHOD FOR CONTROLLING SEMICONDUCTOR MANUFACTURING EQUIPMENTS USING A USER INTERFACE, CAPABLE OF PREVENTING THE LOSS OF DATA IN CASE OF A SCREEN CHANGE
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机译：使用用户界面来控制半导体制造设备的系统和方法，能够在发生屏幕变化的情况下防止数据丢失
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摘要
PURPOSE: A system and a method for controlling semiconductor manufacturing equipments using a user interface are provided to easily access to various menus using a navigation menu.;CONSTITUTION: A plurality of menu dialogs(228) controls, monitors and manages semiconductor manufacturing equipments. A navigation menu(234) displays a plurality of menu dialogs to which a user accesses. A navigation processing unit(226) activates the navigation menu. The navigation processing unit resister and manages the navigation menu. A display driving unit(230) drives the navigation menu to be output on a screen.;COPYRIGHT KIPO 2010
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