System and method for controlling semiconductor manufacturing equipment using user interface

摘要

Provided is a system and method for controlling a semiconductor manufacturing equipment by means of a user interface. The control system connects at least one controller through a network to a plurality of semiconductor manufacturing equipments. The controller includes a superordinate controller such as a host for remote control and a subordinate controller such as a cluster tool controller. The controller includes a user interface application for controlling, monitoring and managing the semiconductor manufacturing equipment. The user interface application provides a navigation menu in one side region of a screen to display menus, accessed by a user, in the order of history. The navigation menu is provided in the type of menu bars corresponding to the menus accessed by the user. The navigation menu is configured to automatically store data corrected by the user, prior to conversion to another menu. The menus accessed by the user can be rapidly selected by means of the user interface, and the loss of the corrected data in the accessed menu can be prevented.