CONTROL METHOD OF LASER PROCESSING RATE AND PROCESSED SECTION BASED ON PHOTO-INDUCED TRANSIENT ABSORPTION AND A CONTROL APPARATUS USING THE SAME

摘要

PURPOSE: A control method of laser processing rate and processed section based on a photo-induced absorption process and a control apparatus using the same are provided to enable cutting, drilling, scribing, and dicing processes which cannot be enabled by mechanical processes.;CONSTITUTION: A control method of laser processing rate and processed section based on a photo-induced absorption process comprises following steps. An object is processed by a super speed laser of which the pulse width is picoseconds or less. The super speed laser beam is irradiated on the object so that the object absorbs the laser beam. The laser processing rate and processed section of the super speed laser are controlled using photo-induced transient absorption. The photo-induced transient absorption generates electron transition.;COPYRIGHT KIPO 2010