SPECTROSCOPIC ELLIPSOMETER, CAPABLE OF MEASURING THE OPTICAL PROPERTY OR THE THICKNESS OF A SPECIMEN USING THE POLARIZING STATE OF THE LIGHT REFLECTED FROM THE SURFACE OF THE SPECIMEN

摘要

PURPOSE: A spectroscopic ellipsometer is provided to more accurately measure the property of a specimen by calculating an ellipsometric variable accurately.;CONSTITUTION: A spectroscopic ellipsometer(100) comprises a light source(10), a polarized light generating unit(20), a polarized light analyzing unit(30), a spectroscope(50), a multi-channel detector(60), a stepping motor(40) and a controller(70). The light source illuminates light to a specimen. The polarized light generating unit is arranged between the light source and the specimen on the travel route of the light. The polarized light analyzing unit receives the light with a changed polarizing state and polarizes the received light. The spectroscope splits the light passing through the polarized light analyzing unit by wavelengths. The multi-channel detector measures the amount of the light split by wavelengths from the spectroscope. The stepping motor rotates at least one of the polarized light generating unit and the polarized light analyzing unit at a predetermined unit angle. The controller outputs motor driving pulse to the stepping motor.;COPYRIGHT KIPO 2010