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APPARATUS FOR GROWING A SINGLE CRYSTAL, CAPABLE OF IMPROVING THE CRYSTAL GROWTH BY CONDENSING A SUBLIMATED RAW MATERIAL
APPARATUS FOR GROWING A SINGLE CRYSTAL, CAPABLE OF IMPROVING THE CRYSTAL GROWTH BY CONDENSING A SUBLIMATED RAW MATERIAL
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机译:用于生长单个晶体的设备,该设备能够通过浓缩次生原料来改善晶体生长
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摘要
PURPOSE: An apparatus for growing a single crystal is provided to grow a single crystal with large diameter by preventing inflow and expansion of the poly-crystal.;CONSTITUTION: A crucible(110) receives a raw material. A guide tube(120) is inserted to the bi-penetrated shape into the top of inside of crucible and a protrusion to middle direction of the crucible. A quartz tube(130) protects the outer circumference of the crucible. The upper base lid(150) open and close the opened top and has a seed holder(152). An SiC seed is attached to the seed holder. An induction coil is spaced from outer side surface of the quartz tube and induces crucible.;COPYRIGHT KIPO 2010
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