ALIGNING APPARATUS, BONDING APPARATUS, LAMINATED SUBSTRATE MANUFACTURING APPARATUS, EXPOSURE APPARATUS AND ALIGNING METHOD

摘要

Alignment operation of an aligning apparatus is shortened. The aligning apparatus for aligning a substrate having an alignment mark is provided with a first aligning section for aligning the substrate with a first reference position, a second aligning section for aligning a substrate holding member with a second reference position prior to holding the substrate, and a position detecting section for detecting the position of the alignment mark of the substrate after holding the substrate by a substrate holding section.;COPYRIGHT KIPO & WIPO 2010