OPTIMIZATION METHOD AND A LITHOGRAPHIC CELL THROUGH MINIMIZING VARIABLES IN A PROBABILITY MODEL OF A DOUBLE PATTERING

摘要

PURPOSE: An optimization method and a lithographic cell is provided to optimize valuables by recording variables at each step and measuring the property of inter-feature in a double patterning, and then modeling a final feature.;CONSTITUTION: A first fabricating step is performed to have a first variable having at least more than 1. A first intermediate feature is measured as a first property. The second manufacturing step is performed to have a second variable having at least more than 1. A second intermediate feature is measured as a second property. The property of a final feature is modeled based on the first and the second variable having at least more than 1, and the final property is measured.;COPYRIGHT KIPO 2010