BOAT SLOT STRUCTURE FOR A FURNACE APPARATUS, CAPABLE OF PREVENTING AVOIDING DEFOCUS DUE TO A BENT WAFER

摘要

PURPOSE: A boat slot structure for a furnace apparatus is provided to prevent avoiding defocus generated by the partial thickness difference of a wafer rear surface.;CONSTITUTION: A boat slot structure for a furnace apparatus comprises a boat cap and a boat bar(220) formed in the shape of a disc. A boat bar is formed in a cylindrical shape in which one end is connected to the lower part of the boat cap. A groove(220b) is formed on the side contacting the wafer of the slot. A groove formed on the side contacting the wafer of the slot is formed in the shape of a checker board.;COPYRIGHT KIPO 2010