首页> 外国专利> THREE DIMENSION MEASUREMENT APPARATUS FOR IMPROVING MEASURING ACCURACY WITHOUT USING A TELECENTRIC OPTICAL SYSTEM

THREE DIMENSION MEASUREMENT APPARATUS FOR IMPROVING MEASURING ACCURACY WITHOUT USING A TELECENTRIC OPTICAL SYSTEM

机译:无需使用远心光学系统即可提高测量精度的三维测量装置

摘要

PURPOSE: A three dimension measurement apparatus is provided to improve measure accuracy by correcting the mismatching of measuring data from a view angle of a lens of an image device.;CONSTITUTION: A three dimension measurement apparatus comprises a projection unit(4) which directs pattern light including the intensity distribution of the stripe pattern to an object to be examined, an imaging unit(5) which takes a picture of the reflection light from the object which be measured in which the pattern light is directed, an image process unit which measures the height of each coordinate location on the object based on image data, and a correction operation member which corrects the mismatching of measuring data from a view angle of a lens(5a) or a coordinate data of the measuring object point on the object.;COPYRIGHT KIPO 2010
机译:目的:提供了一种三维测量设备,以通过从图像设备镜头的视角校正测量数据的失配来提高测量精度。组成:一种三维测量设备,包括用于引导图案的投影单元(4)包括条纹图案到待检查对象的强度分布的光,成像单元(5),其对来自被测对象的反射光进行拍照,其中图案光被引导到该成像单元;图像处理单元,其测量基于图像数据的对象上的每个坐标位置的高度,以及校正操作部件,该校正操作部件从透镜(5a)的视角或对象上的测量对象点的坐标数据校正测量数据的失配。版权所有KIPO 2010

著录项

  • 公开/公告号KR20100083698A

    专利类型

  • 公开/公告日2010-07-22

    原文格式PDF

  • 申请/专利权人 CKD CORPORATION;

    申请/专利号KR20090112035

  • 发明设计人 ISHIGAKI HIROYUKI;

    申请日2009-11-19

  • 分类号G01B11/25;G02B27/22;G01B11/30;H01L21/66;

  • 国家 KR

  • 入库时间 2022-08-21 18:32:13

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