OPERATION METHOD OF A MICROMECHANICAL COMPONENT WHICH INCLUDES AN ELECTROSTATIC ACTUATOR CAPABLE OF REDUCING A VOLTAGE WHICH IS REQUIRED TO CONTROL AT LEAST ONE FRAME

摘要

PURPOSE: An operation method of a micromechanical component is provided to reduce the ratio between the base side area of an electrostatic actuator and the number of frames of the actuator by directly arranging an electrode finger in the frame bar of a frame.;CONSTITUTION: An electrostatic actuator comprises a plurality of intermediate frames(10) and a single outer frame(12). The outer frame surrounds the intermediate frame. Two outer springs(18) are formed between the outer frame and the outermost intermediate frame. The longitudinal direction of the outer spring is arranged on a second rotary shaft(20) which is vertically aligned towards a first rotary shaft(16). An intermediate electrode finger is arranged in the frame bar(10a) of the intermediate frame.;COPYRIGHT KIPO 2010