CAPACITOR WHICH CAN PREVENT THE PHENOMENON INCLINING OF THE BOTTOM ELECTRODES BY INCLUDING THE RIGIDIZER SUPPORTING THE TOP OF THE BOTTOM ELECTRODES AND A METHOD OF MANUFACTURE THEREOF

摘要

PURPOSE: By preventing the reduction of the surface area of capacitor and manufacturing method thereof silver bottom electrode the high capacitance is obtained.;CONSTITUTION: A plurality of bottom electrodes(116) is regulary arranged on the substrate(100). Bottom electrodes have the fixed height in the upper side and even each site. The rigidizer(110b) is respectively touched with a part of the upper sidewall side of a neighboring pair of bottom electrodes. The dielectric layer is formed according to the surface of rigidizers and bottom electrodes.;COPYRIGHT KIPO 2011