ARRAY CHIP OF HIGH SENSITIVITY FOR BIO MOLECULE ANALYSIS USING HYDROPHOBIC AND HYDROPHILIC SURFACES

摘要

PURPOSE: An array chip of high sensitivity for bio molecule analysis using hydrophobic and hydrophilic surfaces and a method for manufacturing the same are provided to intensively arrange inside a microwell.;CONSTITUTION: An array chip(10) of high sensitivity comprises a plurality of microwells(3) on a substrate(1). The microwell has metal thin film(5) and hydrophobic(7) in laminated multilayer thin film. The metal thin film has Ti, Cr, Al, Cu, Au, Ag, Pt, Si, Rh, Ru, V, Ta or mixture thereof. A method for manufacturing the microarray comprises: a step of depositing the metal thin film on the substrate; a depositing hydrophobic thin film on the metal thin film; a step of patterning the metal thin film and hydrophobic thin film by picture process; a step of etching the metal thin film and hydrophobic thin film to form a plurality of microwells; and a step of forming hydrophilic thin film with hydrophilic functional group.;COPYRIGHT KIPO 2011