AN APPARATUS FOR GENERATING LASER-BASED ULTRASONIC BY MULTI-BEAM IRRADIATION

摘要

PURPOSE: An apparatus for generating laser-based ultrasonic by a multi-beam irradiation is provided to utilize a reliable re-crystallization and grain aspect ratio and an internal default estimation by acquiring a signal with a high S/N ratio. CONSTITUTION: An apparatus for generating laser-based ultrasonic by multi-beam irradiation includes a pulsed Nd-YAG laser(10), a plurality of beam splitter modules(30,40,50), and a pulse distance controlling focusing lens(60). The pulsed Nd-YAG laser(10) generates laser beam. The plurality of beam splitter modules(30,40,50) form one strand of strong-strength laser beam as plural strands of laser beam. The pulsed Nd-YAG laser(10) includes a beam reducer set having concave and convex lenses so as to reduce the size of beam. The beam splitter module(40) includes a plurality of mirrors such that beam reflected on the beam splitter module(30) has a suitable optical path. The beam splitter module(50) receives laser transmitted from the beam splitter module(30).