SILICON INGOT GROWER AND A BODY FOR A VACUUM CHAMBER OF THE SILICON INGOT GROWER, CAPABLE OF SUPPRESSING CORROSION AND DEFORMATION

摘要

PURPOSE: A silicon ingot grower and a body for a vacuum chamber of the silicon ingot grower are provided to prevent damage to sealing by circulating cooling water along an upper flange and discharging it to an outlet.;CONSTITUTION: A vacuum chamber is included of a body equipped with a guide member. A crucible is included inside the vacuum chamber. The body comprises an inlet and an outlet(109). Cooling water flows along the guide member(111) and discharges to the outlet. A diaphragm(113) locates between a communications path(115) and the outlet.;COPYRIGHT KIPO 2010