PLACING TABLE STRUCTURE, METHOD FOR MANUFACTURING PLACING TABLE STRUCTURE AND HEAT TREATMENT APPARATUS

摘要

The invention of cracks and ceramic mount table, it prevents the cracking of the joints of the supporting pillars It is an object of the present invention to provide a structure capable of mounting table. ; and the process vessel (4) with the ceramics for mounting the object to be processed in order to carry out a predetermined heat treatment on the target object (W) in the bar (32), for supporting the pedestal In the mounting table structure having means (31) to the support, to the surface of the mount table, a compressive stress in the plane direction to form a quartz glass coating layer (54) to the holding state. As a result, cracks and the ceramic mount table, thereby preventing the cracking of the junction of the pillar to support it.