Ion beam mass separation filter, mass separation method thereof and ion source using the same

摘要

is an object of the present invention, unwanted ion species to simplify the electrode structure of the ion source and also can be miniaturized to provide a mass filter for separating the ion source and the mass separation method for selectively removing. ; mass separation filter 20 is the first in a direction perpendicular to the bimchuk 21 of the ion beam a first magnet for forming a magnetic field (22) and, along the axis of the beam is arranged in series to the first magnet, and perpendicular to the bimchuk, and the second magnet to form a second magnetic field of a first magnetic field and parallel to the reverse (23) and , the first, is formed in the second magnetic field, the first magnetic field and is deflected by the second magnetic field from the first curved path (22a) by a first magnetic field along a moving direction opposite to the deflected second curved path (23a) path ( 25) has a collimator walls 26 for forming. By mass separation filter, the ion that enters the first and second ions of desired mass to the reverse curved path by the magnetic field of the magnet can be attracted to the same direction bimchuk.