METHOD FOR LASER PROCESSING AND PROCESSING DEVICE, based on the conventional laser-induced material changes

摘要

The present invention relates to a technique that remarkably increases the processing speed of a conventional ultrafast laser micro process having a very high processing accuracy. According to the present invention, a laser processing method based on transient changes in the status of laser- induced material couples a pulse of a ultrafast laser to a pulse of at least one auxiliary laser other than the ultrafast laser to reversibly change a material to be processed.