A process for the correction of non-linearities of the interferometer a coordinates - measuring machine

摘要

A process for the correction of non-linearities of the interferometer a coordinates - measuring machine (1), wherein a in a plane (25a) movable measuring table (20) is provided that the plane (25a) by means of an axis in the x - coordinate direction and another axis is defined in the y - coordinate direction, wherein the measurement table (20) in each case an interferometer in (24) in the x - coordinate direction and in the y - coordinate direction in order to determine the position of the measuring stage (20) is assigned to the fact that a measurement objective (9) for determining the position of structures (3) on a substrate (2) in an optical axis is arranged, wherein the substrate (2) in the measuring table (20) is inserted, and wherein a measuring position (50), on the at least one is to be measured, structure (3) is provided, with the measurement table (20) in the optical axis of the method, characterised by the steps of:• that in the case of the measurement of the position of the respective structure on the substrate of the measuring table (20) on the measuring position (50) is stationary;• in that, during the..