Optical image's contrast increasing method for bright field-inspection arrangement of sample to be tested, involves analyzing differences of generated partial images, where two different colors are detected by scanning sensor

摘要

The method involves separating an imaging beam path into partial beam paths using two filters e.g. color filters (9, 10) or polarizing filters. The partial beam paths are discretely received by a color scanning camera (5) that is provided with a scanning sensor (19). Differences of generated partial images are analyzed, where two different colors are detected by the scanning sensor. Information about asymmetrically controlled disturbances (1) are obtained from the difference of both color signals, where the disturbances are absorbed in both wavelength ranges. An independent claim is also included for a device for performing a method for increasing contrast of optical image in a bright field-inspection arrangement for a sample to be tested.