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Inclination angle direction determining method for micro-electro-mechanical system component, involves determining inclination angle by comparison of reference line and middle line by computer device
Inclination angle direction determining method for micro-electro-mechanical system component, involves determining inclination angle by comparison of reference line and middle line by computer device
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机译:微机电系统部件的倾角方向确定方法,涉及通过计算机装置比较基准线和中线来确定倾角
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摘要
The method involves detecting plumb line pendulum oscillations of a pendulum device (2) comprising a plumb line (12). A position of a reference line of a component or a recess is detected by cameras (3a, 3b) arranged in a predetermined angle to each other. Direction of ground acceleration is determined by calculating a middle line from plumb line pendulum positions by a computer device (18) attached to the cameras, where the positions are detected by the cameras. An inclination angle is determined by comparison of the reference line with the middle line by the computer device. An independent claim is also included for a device for determining an inclination angle between a reference line of an electronic component or a recess accommodating a component, and a direction of ground acceleration.
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