A process for the determination of the erosion on a surface of a workpiece in a result of the application of grooved structures by means of an ecm method

摘要

The method according to the invention for determination of the erosion on a surface of a workpiece in a result of the application of grooved structures by means of an ecm method comprises the steps of:Scanning of the surface, along a measuring section, wherein at least two adjacent grooved structures are detected by the sampling,Detecting a depth profile of the surface consisting of a plurality of measured values recorded along the measuring section,Alignment of the measured values in respect to a reference line, identifying and selection of regions of the depth profile between the grooved structures,Determining a along the measuring section to be expected theoretical depth profile by means of mathematical approximation,Determining the expected theoretical erosion function by superposition of the theoretical depth profiles,Adaptation of the expected theoretical erosion function to the selected measurement data between the grooved structures by means of a mathematical algorithm, andDetermining the maximum erosion from the result of the adaptation.