首页> 外国专利> Optical mirror for reflection of radiation, has mirror substrate with multiple mirror elements, which represent sections of total-mirror surface separated by gaps

Optical mirror for reflection of radiation, has mirror substrate with multiple mirror elements, which represent sections of total-mirror surface separated by gaps

机译:用于反射辐射的光学镜,具有带多个镜元件的镜基板,这些镜元件代表由间隙分开的全镜表面部分

摘要

The optical mirror (13) has a mirror substrate (20) with multiple mirror elements (19), which represent sections of a total-mirror surface separated by gaps (59). The mirror elements are adjacent and connected with each other by the solid body hinges (35,37), where a reflection surface (25) is also provided. The adjacent mirror elements and the solid body hinges are manufactured from mirror substrate. An independent claim is included for a method for manufacturing a mirror.
机译:光学镜(13)具有带有多个镜元件(19)的镜基板(20),所述镜元件表示由间隙(59)隔开的全镜表面的部分。镜元件通过实心铰链(35,37)相邻并彼此连接,在实心铰链(35,37)上还设有反射表面(25)。相邻的镜元件和固体铰链由镜基板制造。包括用于制造镜子的方法的独立权利要求。

著录项

  • 公开/公告号DE102009032194A1

    专利类型

  • 公开/公告日2010-04-22

    原文格式PDF

  • 申请/专利权人 CARL ZEISS SMT AG;

    申请/专利号DE20091032194

  • 发明设计人 DINGER UDO;

    申请日2009-07-07

  • 分类号G02B5/10;G02B5/08;

  • 国家 DE

  • 入库时间 2022-08-21 18:28:14

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