prober for on - water - measurements under emi - shielding

摘要

Arrangement for testing of wafers (7), the following components comprising:– a chuck (5) with a receiving surface (11) for receiving a wafer (7), wherein the receiving surface (11), at least in sections, is electrically conductive in order to act on the receiving surface (11) with a defined potential or to the electrical contacting of the wafer (7),– an at least the chuck (5) enveloping, which forms an electromagnetic shielding housing (8);– at least one positioning device (6), with which the chuck (5) is positionable,– a signal preamplifiers (20), the inside of the housing (8) adjacent to the chuck (5) and the chuck is arranged for strength signal port (24) with the receiving surface (11) is electrically connected,– the signal preamplifiers (20) by means of the positioning device (6) together with the chuck (5) is movable in such a way that it its position relative to the chuck (5) during its positioning and maintains an unchanged– a measuring unit (40) outside of the housing (8) which, with the signal preamplifiers (20) with a..