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in / to / on a lid device for a storage vessel for untreated and behandlungssystem for untreated things things
in / to / on a lid device for a storage vessel for untreated and behandlungssystem for untreated things things
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机译:在 /到 /上用于未处理的东西的容器和用于未处理的东西的手肺系统的盖子设备上
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摘要
An opening and closing apparatus (52, 54) opens and closes an opening and closing lid (10) which closes an opening part (4) of an accommodating box (2) for accommodating an object (W) to be processed and is locked by a locking mechanism (12). A key member (26) is mounted to a base table (90) via a bearing mechanism (92) in a state in which the key member is rotatable with respect to the base table (90) and movable in a vertical direction with respect to a front surface of the base table (90). A part of the opening and closing lid (10) is held by being put between the key member (26) and an elastic member (98) provided on a front surface of the base table. Thereby, the opening and closing lid (10) is prevented from being displaced with respect to the base table (90) when the opening and closing lid (10) is removed from the accommodation box (2). IMAGE
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