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in / to / on a lid device for a storage vessel for untreated and behandlungssystem for untreated things things

机译:在 /到 /上用于未处理的东西的容器和用于未处理的东西的手肺系统的盖子设备上

摘要

An opening and closing apparatus (52, 54) opens and closes an opening and closing lid (10) which closes an opening part (4) of an accommodating box (2) for accommodating an object (W) to be processed and is locked by a locking mechanism (12). A key member (26) is mounted to a base table (90) via a bearing mechanism (92) in a state in which the key member is rotatable with respect to the base table (90) and movable in a vertical direction with respect to a front surface of the base table (90). A part of the opening and closing lid (10) is held by being put between the key member (26) and an elastic member (98) provided on a front surface of the base table. Thereby, the opening and closing lid (10) is prevented from being displaced with respect to the base table (90) when the opening and closing lid (10) is removed from the accommodation box (2). IMAGE
机译:开闭装置(52、54)开闭开闭盖(10),该开闭盖(10)关闭用于收纳被处理物(W)的收纳盒(2)的开口部(4),并被锁定。锁定机构(12)。键构件(26)经由轴承机构(92)被安装在基座(90)上,在该状态下,键构件能够相对于基座(90)旋转,并且能够相对于基座(90)在上下方向上移动。基台(90)的前表面。通过将开闭盖(10)的一部分置于键构件(26)和设置在基台的前表面上的弹性构件(98)之间而将其保持。由此,在将开闭盖10从收纳箱2卸下时,能够防止开闭盖10相对于基台90移位。 <图像>

著录项

  • 公开/公告号DE60043699D1

    专利类型

  • 公开/公告日2010-03-04

    原文格式PDF

  • 申请/专利权人 TOKYO ELECTRON LTD.;

    申请/专利号DE20006043699T

  • 申请日2000-07-13

  • 分类号H01L21/68;B65G1;B65G49/07;H01L21/673;H01L21/677;

  • 国家 DE

  • 入库时间 2022-08-21 18:27:39

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