ADAPTATION TARGET REGULATION FOR HEALTH SERVICE PROCEDURE

摘要

The present application pertains to unconventional sputter target/backing plate assemblies ( 10 ) for high power operation and to the low temperature method of making them. The sputter target/backing plate assemblies ( 10 ) comprise targets ( 12 ) and backing plates ( 16 ) having dissimilar thermal coefficients of expansion. Although the consolidated targets ( 12 ) and backing plates ( 16 ) have dissimilar thermal coefficients of expansion, they are able to be bonded together and used at high sputtering temperatures without bowing or bending and are able to utilize backing plates ( 16 ) normally associated with a specified target metal. In the method of making, a plurality of male projections ( 16 ) are formed in one member of the assembly ( 10 ) with a plurality of corresponding female grooves ( 32 ) formed in the other surface. The assembly ( 10 ) is bonded by conventional techniques around an annular zone that surrounds the male ( 26 ) and female portions ( 32 ). The assembly ( 10 ) is then pressure consolidated at low temperature so that the projections are force fit into the female recesses.