ELECTRON BEAM HOLOGRAM FORMING DEVICE AND ELECTRON BEAM HOLOGRAM FORMING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an electron beam hologram forming device capable of coping with a screening phenomenon and an electron beam hologram forming method.;SOLUTION: The electron beam hologram forming device is provided with a first electrode and a second electrode for impressing voltage on a sample. In the electron beam hologram forming method, electron beams are irradiated on the sample in a state the voltage is impressed on the sample to form the electron beam hologram.;COPYRIGHT: (C)2011,JPO&INPIT