POSITIONAL DEVIATION MEASURING DEVICE, POSITIONAL DEVIATION MEASURING METHOD, AND POSITIONAL DEVIATION MEASURING PROGRAM

摘要

PROBLEM TO BE SOLVED: To improve measurement accuracy of positional deviation based on correlation between respective patterns.;SOLUTION: This measuring method includes: a signal processing equivalent to operation for adding m-kinds (m is an integer satisfying an inequality: m≥M) of pieces of phase information for showing mutually nonparallel phase traveling directions to each of pattern signals corresponding to two N-dimensional patterns (N is an integer of 2 or larger) to be compared, and determining correlation between m-sets of pattern signals to which the same pieces of phase information are added; and a processing for determining positional deviation between patterns based on the m-sets of pieces of correlation phase information acquired by the signal processing.;COPYRIGHT: (C)2011,JPO&INPIT