TRANSFER VIBRATION MONITORING DEVICE, VACUUM PROCESSING APPARATUS, AND TRANSFER VIBRATION MONITORING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a transfer vibration monitoring device for an in-line film forming apparatus which adjusts a level difference between bearings of a substrate transfer mechanism more accurately and quicker than a conventional one, thereby improving a service factor of the apparatus and the yield of products, and reducing the maintenance cost.;SOLUTION: The transfer vibration monitoring device monitors vibrations applied to a carrier T which carries a substrate 6 and moves along a transfer passage R laid in the in-line film forming apparatus S. The monitoring device includes an acceleration sensor 5 which is attached to the carrier T and is capable of measuring an acceleration change, and a PC 13 which analyzes acceleration measurement data obtained by acceleration sensor 5.;COPYRIGHT: (C)2011,JPO&INPIT