SYSTEM FOR CALCULATING VALUE OF TRANSMISSION EFFICIENCY OF OPTICAL ENERGY FOR EXPOSURE AND METHOD OF CALCULATING VALUE OF TRANSMISSION EFFICIENCY OF OPTICAL ENERGY UTILIZING THE CALCULATION SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a system for calculating a value of a transmission efficiency of an optical energy for exposure, and a method of calculating the value of the transmission efficiency of the optical energy using the calculation system.;SOLUTION: The system comprises: a data server 50 which, while receiving an optical energy value generated by an excimer laser generator 10 through a network line 60, receives an exposure energy value used for exposure of unit exposure area by an exposure device 40 from the exposure device 40 through the network line 60, and multiplies a value, obtained by dividing the exposure energy value used for the exposure of the unit exposure area with the optical energy value generated by the excimer laser generator 10, by 100 to calculates a value of an optical transmission efficiency in real time; and a control room server 70 which receives the value of the optical transmission efficiency calculated by the data server 50 through the network line 60 so as to predict a defect or contamination of an optical system 20 installed between the excimer laser generator 10 and exposure device 40.;COPYRIGHT: (C)2011,JPO&INPIT