SYSTEM FOR CALCULATING VALUE OF TRANSMISSION UTILIZATION EFFICIENCY OF OPTICAL ENERGY FOR EXPOSURE AND METHOD OF CALCULATING VALUE OF TRANSMISSION UTILIZATION EFFICIENCY OF OPTICAL ENERGY UTILIZING THE CALCULATION SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a method of calculating a value of a transmission utilization efficiency of an optical energy generated by an excimer laser generator and utilized for exposure of a wafer.;SOLUTION: The system for calculating a value of a transmission utilization efficiency of an optical energy for exposure includes an excimer laser generator 10 and an exposure device 40 for receiving through an optical system 20 made up of a lens and a reflection mirror and exposing each unit exposure area of a wafer 30, in which: the value of an optical energy of an excimer laser light generated by the excimer laser generator 10 is received through a network line 60 from the excimer laser generator 10, while at the same time, the value of an exposure light energy utilized for exposure per unit exposure area in the exposure device 40 is received through a network line 60 from the exposure device 40; and the value of an optical transmission utilization efficiency is derived in real time through the calculation of dividing the value of an exposure light energy utilized for exposure per unit exposure area by the value of an optical energy of an excimer laser light generated by the excimer laser generator 10 and multiplying the divided result by 100.;COPYRIGHT: (C)2008,JPO&INPIT