HOLE-ROUGHNESS QUANTIFICATION DEVICE AND HOLE-ROUGHNESS QUANTIFICATION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a hole-roughness quantification device and a hole-roughness quantification method that can quantify roughness speedily and accurately without the need to artificially designate areas which should be quantified, when quantifying the roughness of the hole pattern formed on a photomask, or the like.;SOLUTION: When the roughnesses of measurement target patterns are quantified from a contour line of measurement target patterns and reference patterns, the present invention calculates the difference between positional coordinates of a plurality of points located on the contour line of the measurement target patterns and positional coordinates of a plurality of balls located on the contour line of the reference patterns and calculates the roughness values of the measurement target patterns, based on the difference distance calculated.;COPYRIGHT: (C)2011,JPO&INPIT