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TERAHERTZ SPECTROSCOPIC DEVICE, METHOD FOR MANUFACTURING THE SAME, AND TERAHERTZ SPECTROMETER
TERAHERTZ SPECTROSCOPIC DEVICE, METHOD FOR MANUFACTURING THE SAME, AND TERAHERTZ SPECTROMETER
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机译:TERAHERTZ光谱仪,其制造方法以及TERAHERTZ光谱仪
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摘要
PROBLEM TO BE SOLVED: To well measure a terahertz transmission spectrum without scaling up constitution even if a measuring target is gas having a small absorption coefficient with respect to terahertz waves.;SOLUTION: A substrate is used which has an internal space 15 in which the measuring target is housed and a photonic crystal type resosnator structure for internally reflecting the terahertz waves incident through an incident port 11A in the internal space 15 by a plurality of times to guide the same to an emitting port side. A propagation distance required for measurement is sufficiently ensured by internally reflecting the terahertz waves in the internal space by a plurality of times. By this constitution, the terahertz transmission spectrum can be well measured without scaling up the constitution even with respect to the gas small in the absorption coefficient with respect to the terahertz waves.;COPYRIGHT: (C)2011,JPO&INPIT
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