TRACE MOISTURE GENERATION DEVICE AND STANDARD GAS PRODUCTION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a trace moisture generation device capable of controlling highly accurately trace moisture generated from a diffusion pipe cell for calibrating accurately a trace moisture measuring device for measuring trace moisture in standard gas, and changing quickly and stabilizing a moisture concentration in the standard gas for examining responsiveness of the trace moisture measuring device.;SOLUTION: In a trace moisture generation tank 41, the diffusion pipe cell 43 is stored in a chamber 42 whose temperature is controlled by a temperature controller (not shown). A pressure controller 44 for controlling a pressure in the chamber 42 is connected to a conduit on the inlet side of the trace moisture generation tank 41, and a constriction element 47 for restricting flow is connected to a conduit on the outlet side of the trace moisture generation tank 41. The constriction element 47 controls a pressure ratio (downstream pressure/upstream pressure) between the downstream side from a constriction part 48 and the upstream side therefrom, namely, the inside of the chamber 42, at ≤0.53.;COPYRIGHT: (C)2011,JPO&INPIT