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SUPERCONDUCTING SINGLE PHOTON DETECTOR, AND MOUNTING METHOD OF SUPERCONDUCTING SINGLE PHOTON DETECTOR
SUPERCONDUCTING SINGLE PHOTON DETECTOR, AND MOUNTING METHOD OF SUPERCONDUCTING SINGLE PHOTON DETECTOR
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机译:超导单光子探测器和超导单光子探测器的安装方法
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摘要
PROBLEM TO BE SOLVED: To provide a superconducting single photon detector which achieves highly-efficient optical coupling adapting to a size of a light receiving element having a lamination structure.;SOLUTION: The superconducting single photon detector 200 includes: a superconducting single photon detection element 100 having a substrate 10 formed of magnesium oxide, a niobium nitride wiring 13 formed on a surface of the substrate 10, a cavity layer 12 formed on the niobium nitride wiring 13, a reflection layer 11 formed on the cavity layer 12, and a reflection preventing layer 14 formed on a rear surface of the substrate 10; and an optical transmission structure 23 having an optical fiber 72, and a lens 75 aligned and fused on a tip of the optical fiber 72. A distance from a tip of the lens 75 to the niobium nitride wiring 13 is adjusted so that emitted light from the lens 75 has a predetermined beam waist diameter 2ωo on the niobium nitride wiring 13.;COPYRIGHT: (C)2011,JPO&INPIT
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机译:解决的问题:提供一种超导单光子检测器,其实现高效的光耦合,以适应具有层叠结构的光接收元件的尺寸。解决方案:超导单光子检测器200包括:超导单光子检测元件100具有由氧化镁形成的基板10,在基板10的表面上形成的氮化铌布线13,在氮化铌布线13上形成的空腔层12,在空腔层12上形成的反射层11以及反射在基板10的背面形成有防止层14。光学传输结构23具有光纤72和在光纤72的末端对准并熔合的透镜75。调整从透镜75的末端到氮化铌布线13的距离,以使来自该发光二极管的发射光成为可能。透镜75在氮化铌布线13上具有预定的束腰直径2Ω o Sub>;版权所有:(C)2011,JPO&INPIT
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