Mounting method of superconducting single photon detector

摘要

PROBLEM TO BE SOLVED: To provide a superconducting single photon detector which achieves highly-efficient optical coupling adapting to a size of a light receiving element having a lamination structure.;SOLUTION: The superconducting single photon detector 200 includes: a superconducting single photon detection element 100 having a substrate 10 formed of magnesium oxide, a niobium nitride wiring 13 formed on a surface of the substrate 10, a cavity layer 12 formed on the niobium nitride wiring 13, a reflection layer 11 formed on the cavity layer 12, and a reflection preventing layer 14 formed on a rear surface of the substrate 10; and an optical transmission structure 23 having an optical fiber 72, and a lens 75 aligned and fused on a tip of the optical fiber 72. A distance from a tip of the lens 75 to the niobium nitride wiring 13 is adjusted so that emitted light from the lens 75 has a predetermined beam waist diameter 2_o on the niobium nitride wiring 13.;COPYRIGHT: (C)2011,JPO&INPIT