PIEZOELECTRIC CERAMICS POWDER FOR AEROSOL DEPOSITION, PIEZOELECTRIC ELEMENT AND FILM DEPOSITION METHOD

摘要

PROBLEM TO BE SOLVED: To attain compatibility between security of piezoelectric properties and security of film deposition efficiency when a piezoelectric film is deposited by an aerosol deposition method.;SOLUTION: Piezoelectric ceramics powder for aerosol deposition has a main phase, which consists essentially of (K,Na)NbO₃ and has a perovskite structure, and a different phase, which is mixed in the main phase and has a tungsten bronze structure, and has the peak intensity ratio I1/I0 (wherein I1 is the peak intensity of the different phase when measured by an X-ray diffraction method; I0 is the peak intensity of the main phase when measured by the X-ray diffraction method) within a predetermined range.;COPYRIGHT: (C)2012,JPO&INPIT