MULTILAYER FILM LAMINAR DIFFRACTION GRATING AND SPECTROMETER

摘要

PROBLEM TO BE SOLVED: To provide a multilayer film laminar diffraction grating that can be used in a wide wavelength band.;SOLUTION: A multilayer film structure 20, in which a low density material layer and a high-density material layer are laminated alternately is uniformly formed on a diffraction surface of the multilayer film laminar diffraction grating 10. The multilayer film structure 20 is stratified into a plurality of (five) layers in the film thickness direction which are a first layer 21, a second layer 22, a third layer 23, a fourth layer 24 and a fifth layer 25 formed sequentially, in this order starting from the top. Each of the first layer 21 to the fifth layer 25 is made up of the low-density material layer and the high density material layer. The length of the period of the multilayer film (the thickness of the low-density material layer and the thickness of the high-density material layer) differs in each of the first layer 21 to the fifth layer 25, and the length of period is set, such that it is larger on the first layer 21 side (the side where the light is incident) and smaller on the fifth layer 25 side (the substrate 11 side).;COPYRIGHT: (C)2011,JPO&INPIT